Where Are the Intake Manifold Temperature Sensor and Mass Air Flow Sensor Located on a Subaru Legacy, and What Are Their Functions?

Non-turbocharged vehicles produced from 2005 onwards and turbocharged models from 2004 onwards use only MAF/Intake Manifold Temperature Sensors. A MAF/Intake Manifold Temperature Sensor is positioned on top of the air filter housing. One should start by disconnecting the battery terminal cable which is negative. The electrical connector has to be disconnected from the MAF/Intake Manifold Temperature Sensor then for one to remove it from the air filler housing; unplug its electrical connector and loose its mounting screws first. Finally, take out the screws that hold the MAF/Intake Manifold Temperature Sensor in place. Reinstallation ends this process as it was discussed above.

Genuine Subaru Legacy Mass Air Flow Sensor

MAF Sensor Meter

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7 Mass Air Flow Sensors found

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Subaru Legacy Meter Assembly-Air Flow
Part Number: 22680AA38A
$184.08 MSRP: $269.12
You Save: $85.04 (32%)
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Product Specifications
- Other Name: Air Mass Sensor, Mass Air Flow Sensor
- Replaced by: 22680AA380
- Warranty: This genuine part is guaranteed by Subaru's factory warranty.
Fits the following Vehicles:
- 2008-2019 Subaru Legacy | 2.5GT Limited, 2.5GT Premium, 2.5i, 2.5i Base, 2.5i Limited, 2.5i Premium, 2.5i Sport, 2.5i Touring, 3.6R, 3.6R Limited, 3.6R Premium, 3.6R Touring, Base | 2.5L H4, 2.5L H4 DOHC, 2.5L H4 SOHC, 2.5L H4 Turbo, 3.6L H6
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Subaru Legacy Mass Air Flow Sensor
Part Number: 22680AA31A
$159.75 MSRP: $233.55
You Save: $73.80 (32%)
Ships in 1-3 Business Days
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Product Specifications
- Other Name: Meter Assembly Air Flow; Air Mass Sensor, Meter, Meter Assembly Air Flow
- Warranty: This genuine part is guaranteed by Subaru's factory warranty.
Fits the following Vehicles:
- 2004-2009 Subaru Legacy | 2.5i, 2.5i Limited, 3.0R, 3.0R Limited, 3.0R LL-Bean, Base, Cold Weather, GT, GT Limited, L, Limited, L-S, SUS Limited, XT Limited | 2.5L H4, 2.5L H4 Turbo, 3.0L H6
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Subaru Legacy Mass Air Flow Sensor
Part Number: 22680AA310
$229.84 MSRP: $336.02
You Save: $106.18 (32%)
Ships in 1-3 Business Days
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Product Specifications
- Other Name: Meter Assembly Air Flow; Air Mass Sensor, Meter, Meter Assembly Air Flow
- Warranty: This genuine part is guaranteed by Subaru's factory warranty.
Fits the following Vehicles:
- 2004 Subaru Legacy | Baja-B | 2.5L H4 Turbo
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Subaru Legacy A/F Meter Assembly
Part Number: 22680AA43A
$217.43 MSRP: $317.88
You Save: $100.45 (32%)
Ships in 1-3 Business Days
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Product Specifications
- Other Name: Meter Assembly-Air Flow
- Replaces: 22680AA420
- Warranty: This genuine part is guaranteed by Subaru's factory warranty.
Fits the following Vehicles:
- 2020-2021 Subaru Legacy | 2.4R F/R-O, 2.4R Limited, 2.4R Touring, 2.5i, 2.5i Limited, 2.5i Premium, 2.5i Sport, 2.5i Touring | 2.4L H4 DIT, 2.5L H4 DI
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Subaru Legacy Air Flow Meter
Part Number: 22680AA170
$340.20 MSRP: $501.77
You Save: $161.57 (33%)
Ships in 1-3 Business Days
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Product Specifications
- Other Name: Meter Assembly-Air Flow; Air Mass Sensor, Mass Air Flow Sensor
- Warranty: This genuine part is guaranteed by Subaru's factory warranty.
Fits the following Vehicles:
- 1990-1994 Subaru Legacy | Base, L, LS, LS-D, Turbo
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Subaru Legacy Air Flow Meter
Part Number: 22680AA29A
Product Specifications
- Other Name: Meter Assembly-Air Flow
- Replaced by: 22680AA290
- Warranty: This genuine part is guaranteed by Subaru's factory warranty.
Fits the following Vehicles:
- 1999 Subaru Legacy | Brighton, L, Post | 2.2L H4 Series
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Subaru Legacy Air Flow Meter
Part Number: 22680AA160
Product Specifications
- Other Name: Meter Assembly-Air Flow; Air Mass Sensor, Mass Air Flow Sensor
- Warranty: This genuine part is guaranteed by Subaru's factory warranty.
Fits the following Vehicles:
- 1990-1999 Subaru Legacy | Base, Brighton, GT, L, LS, LS-D, LS-I, Out Back, Post, SUS | 2.2L H4 , 2.2L H4 (New EVAPO), 2.5L H4

Subaru Legacy Mass Air Flow Sensor

The Subaru Legacy Mass Air Flow Sensor measures the air entering the engine, which the computer uses to mix fuel so that acceleration is smooth and emissions low. Even Subaru's earlier fuel-injected iterations of the model feature a Mass Air Flow Sensor in the intake duct that reports the incoming air volume to the Powertrain Control Module to modify injector pulse width to actual demand. Many of the early Legacy models relied on the Vane Meter type Mass Air Flow Sensor. This design features a small door attached to a potentiometer. When dirt builds up, the door can stick. As a result, this can cause hesitation or stalling. Later vehicles shifted to the hot wire Mass Air Flow Sensor, where a wire heated electrically cools when air flows past, with the circuit calculating flow from changes in current. This setup offers less restriction and better accuracy than older types, especially during temperature or altitude changes. Both kinds can send a trouble code and light the check engine lamp if contaminants coat the sensing element or if unmetered air leaks into the intake, but usually just a little cleaning and sealing of hoses returns proper readings. Drivers of modern Subaru Legacy models may experience a check engine light when this happens. The Mass Air Flow Sensor is crucial for optimal engine performance.

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Subaru Legacy Mass Air Flow Sensor Parts Questions & Experts Answers

Mass Air Flow Sensor
22680AA310
Q:
Where Are the Intake Manifold Temperature Sensor and Mass Air Flow Sensor Located on a Subaru Legacy, and What Are Their Functions?
Posted by Omar L.
A:
Non-turbocharged vehicles produced from 2005 onwards and turbocharged models from 2004 onwards use only MAF/Intake Manifold Temperature Sensors. A MAF/Intake Manifold Temperature Sensor is positioned on top of the air filter housing. One should start by disconnecting the battery terminal cable which is negative. The electrical connector has to be disconnected from the MAF/Intake Manifold Temperature Sensor then for one to remove it from the air filler housing; unplug its electrical connector and loose its mounting screws first. Finally, take out the screws that hold the MAF/Intake Manifold Temperature Sensor in place. Reinstallation ends this process as it was discussed above.
Answered by Subaru Parts Specialist Anthony / Jul 28, 2026